Local structure analysis of magnetic transparent conducting films by x-ray spectroscopy

We prepared Mn-doped indium-tin oxide (ITO) films on glass substrates by radio-frequency magnetron sputtering and investigated local structures surrounding Mn ions in the films by x-ray absorption spectroscopy. The Fourier transform of the extended x-ray absorption fine structure (EXAFS) spectrum indicated that the Mn ions preferably substitute the In ions at the b sites of the In₂O₃ lattice. According to the threshold energy obtained from the inflection point of the edge in the x-ray absorption near edge structure (XANES) spectrum, the valence of the Mn ions was evaluated to range from  +2 to  +3. These x-ray absorption spectroscopic data are useful for revealing the origin of the magnetism of the Mn-doped ITO films. (paper)