Published September 2004
| Version v1
Journal article
The effects of Ca and Pd dopants on gold bonding wire and gold rod
Description
There is currently little information regarding the physiochemical effects of common bonding wire dopants such as Ca and Pd despite the use of gold bonding wire as an electrical interconnection in over 80% of semiconductor devices. This paper presents experimental results on the residual microstrains in 4 N gold bonding wires with different concentrations of Ca-Pd, measured using peak broadening in X-ray diffraction. The effect of Ca was found to be more prominent. In order to understand more about the physiochemical action of Ca and its effects on the microstructure, TEM and depth sensing nano-indentation (DSI) were used to study 2 mm Ca-doped hard-drawn rods
Additional details
Identifiers
- DOI
- 10.1016/j.tsf.2004.05.032;
- PII
- S0040609004006066;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 462-463
- Journal Issue
- 1
- Journal Page Range
- p. 351-356
- ISSN
- 0040-6090
- CODEN
- THSFAP
Conference
- Title
- International conference on materials for advanced technologies, symposium L: Advances in materials for Si microelectronics - From processing to packaging
- Acronym
- ICMAT 2003
- Dates
- 7-12 Dec 2003
- Place
- Singapore (Singapore)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36079125
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CALCIUM; DOPED MATERIALS; GOLD; MICROSTRUCTURE; PALLADIUM; SEMICONDUCTOR DEVICES; STRESS ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY; WIRES; X RADIATION; X-RAY DIFFRACTION
- Descriptors DEC
- ALKALINE EARTH METALS; COHERENT SCATTERING; DIFFRACTION; ELECTROMAGNETIC RADIATION; ELECTRON MICROSCOPY; ELEMENTS; IONIZING RADIATIONS; MATERIALS; METALS; MICROSCOPY; PLATINUM METALS; RADIATIONS; SCATTERING; TRANSITION ELEMENTS
Optional Information
- Copyright
- Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.