Published September 2004 | Version v1
Journal article

The effects of Ca and Pd dopants on gold bonding wire and gold rod

Description

There is currently little information regarding the physiochemical effects of common bonding wire dopants such as Ca and Pd despite the use of gold bonding wire as an electrical interconnection in over 80% of semiconductor devices. This paper presents experimental results on the residual microstrains in 4 N gold bonding wires with different concentrations of Ca-Pd, measured using peak broadening in X-ray diffraction. The effect of Ca was found to be more prominent. In order to understand more about the physiochemical action of Ca and its effects on the microstructure, TEM and depth sensing nano-indentation (DSI) were used to study 2 mm Ca-doped hard-drawn rods

Additional details

Identifiers

DOI
10.1016/j.tsf.2004.05.032;
PII
S0040609004006066;

Publishing Information

Journal Title
Thin Solid Films
Journal Volume
462-463
Journal Issue
1
Journal Page Range
p. 351-356
ISSN
0040-6090
CODEN
THSFAP

Conference

Title
International conference on materials for advanced technologies, symposium L: Advances in materials for Si microelectronics - From processing to packaging
Acronym
ICMAT 2003
Dates
7-12 Dec 2003
Place
Singapore (Singapore)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
36079125
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CALCIUM; DOPED MATERIALS; GOLD; MICROSTRUCTURE; PALLADIUM; SEMICONDUCTOR DEVICES; STRESS ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY; WIRES; X RADIATION; X-RAY DIFFRACTION
Descriptors DEC
ALKALINE EARTH METALS; COHERENT SCATTERING; DIFFRACTION; ELECTROMAGNETIC RADIATION; ELECTRON MICROSCOPY; ELEMENTS; IONIZING RADIATIONS; MATERIALS; METALS; MICROSCOPY; PLATINUM METALS; RADIATIONS; SCATTERING; TRANSITION ELEMENTS

Optional Information

Copyright
Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.