Published 1977 | Version v1
Report Restricted

Ion microprobe using a field evaporation ion source fed by liquid gallium

Description

A scanning ion microprobe with a resolution of 15 nm or better appears to be quite possible on the basis of a field-evaporation (EHD) ion source that has been developed and a high efficiency system for production and collection of negative secondary ions. The possibilities of still better systems for the analysis of the secondaries using either stopping-power or laser-induced-fluorescence methods of identification are discussed briefly

Availability note (English)

MF available from INIS under the Report Number; Available from NTIS., PC A02/MF A01.

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Additional details

Additional titles

Augmented title (English)
For finding the location of specific stable isotopes in samples

Publishing Information

Imprint Pagination
8 p.
Report number
CONF-770642--12

Conference

Title
3. international conference on ion beam analysis.
Dates
27 Jun - 1 Jul 1977.
Place
Washington, District of Columbia, United States of America (USA).