Published January 28, 2002 | Version v1
Journal article

Temperature-gradient epitaxy under in situ growth mode diagnostics by scanning reflection high-energy electron diffraction

  • 1. Combinatorial Materials Exploration and Technology Corporation (COMET) (Japan)
  • 2. Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba, Sendai, 980-0812 (Japan)
  • 3. Institute for Solid State Physics, University of Tokyo, Kashiwanoha 5-1-5, Kashiwa-shi, Chiba, 277-8581 (Japan)
  • 4. Department of Innovative and Engineering Materials, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama 226-8502 (Japan)
  • 5. CREST, Japan Science and Technology Corporation (Japan)
  • 6. Frontier Collaborative Research Center, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama 226-8503 (Japan)

Description

We have developed a parallel film growth method on a temperature-gradient substrate to quickly control and optimize the film growth mode. A continuous-wave neodymium-doped yttrium-aluminum-garnet laser heating was used to achieve a stable temperature gradient covering a 300 deg. C range of temperatures over a distance of 11 mm. The growth mode was determined by time-resolved scanning reflection high-energy electron diffraction. Transition from layer-by-layer to step-flow growth by the deposition temperature was observed during La0.5Sr0.5MnO3 film growth on a single SrTiO3 substrate, proving a powerful tool not only for investigating the growth dynamics but also for seeking the optimized deposition conditions in one run of experiment

Additional details

Identifiers

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
80
Journal Issue
4
Journal Page Range
p. 565-567
ISSN
0003-6951
CODEN
APPLAB

Optional Information

Notes
(c) 2002 American Institute of Physics.