Drive mechanism with metal bellows

High precision linear mechanism used for ultrahigh vacuum constructed for the TRISTAN electron-positron storage accelerator. These mechanism were applied for the beam monitors and scrapers. All components are made of aluminum alloys except welded bellows. Friction welding-Joint are made of a aluminum alloys flange and dynamic bellows made of stainless steel sus 316L, Both of. Pneumatic and motorised driving mechanism were also constructed. These mechanisms satisfied for some conditions such as high reliability, simplecity, small size, light weight and low cost. (author)