Theoretical model of an optothermal microactuator directly driven by laser beams

This paper proposes a novel method of optothermal microactuation based on single and dual laser beams (spots). The theoretical model of the optothermal temperature distribution of an expansion arm is established and simulated, indicating that the maximum temperature of the arm irradiated by dual laser spots, at the same laser power level, is much lower than that irradiated by one single spot, and thus the risk of burning out and damaging the optothermal microactuator (OTMA) can be effectively avoided. To verify the presented method, a 750 μm long OTMA with a 100 μm wide expansion arm is designed and microfabricated, and single/dual laser beams with a wavelength of 650 nm are adopted to carry out experiments. The experimental results showed that the optothermal deflection of the OTMA under the irradiation of dual laser spots is larger than that under the irradiation of a single spot with the same power, which is in accordance with theoretical prediction. This method of optothermal microactuation may expand the practical applications of microactuators, which serve as critical units in micromechanical devices and micro-opto-electro-mechanical systems (MOEMS). (paper)