Sputtering of molybdenum by low energy He+ bombardment

A high density and low energy helium ion beam is used to study the sputtering of molybdenum by a collector method. Sputtered and deposited amount of molybdenum on a silver collector was measured by Auger electron spectroscopy, which can sensitively detect a surface composition. From the results of this analysis, an angular distribution of sputtered molybdenum and the relative sputtering yield are estimated. The angular distribution is almost close to a cosine distribution, except that small deviations from the cosine law are observed at target normal direction. (orig.)