Published November 1987 | Version v1
Journal article Metadata-only

Combined electron gas SNMS and SIMS instrument for trace and depth profile analysis with high dynamic range

Creators

  • 1. Leybold-Heraeus G.m.b.H. und Co. K.G., Koeln (Germany, F.R.)

Description

Basic physics, technical implementation and applications of a combined SNMS and SIMS instrument improved in dynamic range and detection limits are discussed. (orig.)

Additional details

Publishing Information

Journal Title
Fresenius' Z. Anal. Chem.
Journal Volume
329
Journal Issue
2/3
Series
Fresenius' Z. Anal. Chem.
Journal Page Range
116-121
ISSN
0016-1152
CODEN
ZACFA

Conference

Title
4. working conference on applied surface analysis.
Original Conference Title
4. Arbeitstagung fuer angewandte Oberflaechenanalytik
Dates
30 Jun - 3 Jul 1986.
Place
Kaiserslautern (Germany, F.R.).

INIS

Country of Publication
Germany
Country of Input or Organization
Germany
INIS RN
19036959
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ALLOYS; BEAM OPTICS; DEPTH; ELECTRIC DISCHARGES; ION MICROPROBE ANALYSIS; IONIZATION; MASS SPECTRA; MASS SPECTROMETERS; MASS SPECTROSCOPY; MOLYBDENUM; SENSITIVITY; SPUTTERING; STEELS; THIN FILMS; TRACE AMOUNTS; USES
Descriptors DEC
CARBON ADDITIONS; CHEMICAL ANALYSIS; DIMENSIONS; ELEMENTS; FILMS; IRON ALLOYS; IRON BASE ALLOYS; MEASURING INSTRUMENTS; METALS; MICROANALYSIS; NONDESTRUCTIVE ANALYSIS; SPECTRA; SPECTROMETERS; SPECTROSCOPY; TRANSITION ELEMENTS