Calibration of terminal voltage of accelerator using resonant elastic scattering of ¹⁶O(α, α)¹⁶O at 3.04 MeV

Calibration of the terminal voltage of the accelerator was performed using resonant elastic Scattering of ¹⁶O (α, α)¹⁶O reaction at 3.04 MeV. In this experiment, a relatively thick silicon dioxide was used as a specimen. Backscattering spectra were acquired at different terminal voltages to check the ion beam energy with a silicon substrate of which surface had been oxidized. As a result, the resonant elastic scattering occurred at the sample surface with the terminal voltage of 1540 kV, which corresponded to the ion energy of 3113 keV. The terminal voltage should be 1503 kV, and therefore, it was found that the terminal voltage contained an error of 37 kV in voltage. (author)