Published 1993 | Version v1
Journal article Metadata-only

Structure and properties of thin films of Ti-C-B system

Creators

  • 1. Moskovskij Inst. Stali i Splavov, Moscow (Russian Federation)

Description

Regularities of structure formation and properties of thin films, obtained by magnetron spraying of TiC-TiB2 targets are studied. Optimal regimes for thermal processing of thin film resistors making it possible to achieve record level of electrophysical properties are found

Additional details

Additional titles

Original title (Russian)
Структура и свойства тонких пленок системы Ти-C-Б

Publishing Information

Journal Title
Izvestiya Vysshikh Uchebnykh Zavedenij, Chernaya Metallurgiya
Journal Issue
no.3
Journal Page Range
p. 64-67.
ISSN
0021-3438
CODEN
IVUMAX

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
25051296
Subject category
S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
Descriptors DEI
FLEXURAL STRENGTH; MAGNETRONS; PHASE STUDIES; POROSITY; SPUTTERING; SYNTHESIS; THERMAL EXPANSION; THIN FILMS; TITANIUM BORIDES; TITANIUM CARBIDES
Descriptors DEC
BORIDES; BORON COMPOUNDS; CARBIDES; CARBON COMPOUNDS; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; EXPANSION; FILMS; MECHANICAL PROPERTIES; MICROWAVE EQUIPMENT; MICROWAVE TUBES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS