Published 2005
| Version v1
Journal article
Inductively coupled HF plasma beam source for ion beam assisted deposition in a boxcoater
- 1. FH Giessen-Friedberg, Univ. of Applied Sciences, Friedberg (Germany)
- 2. Leybold Optics GmbH, Alzenau (Germany)
Description
no abstract available
Additional details
Publishing Information
- Journal Title
- Verhandlungen der Deutschen Physikalischen Gesellschaft
- Journal Volume
- 40
- Journal Issue
- 2
- Journal Page Range
- p. 616
- ISSN
- 0420-0195
- CODEN
- VDPEAZ
Conference
- Title
- Physics since Albert Einstein
- Original Conference Title
- Jahrestagung 2005 der Deutschen Physikalischen Gesellschaft (DPG) im World Year of Physics: Physik seit Albert Einstein
- Acronym
- 2005 annual conference of the German Physical Society (DPG) during the World year of physics
- Dates
- 4-9 Mar 2005
- Place
- Berlin (Germany)
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- Germany
- INIS RN
- 36038978
- Subject category
- S43: PARTICLE ACCELERATORS;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- BEAM CURRENTS; BEAM PROFILES; ENERGY BEAM DEPOSITION; EV RANGE 10-100; EV RANGE 100-1000; FILMS; ION BEAMS; ION SOURCES; PLASMA; REFRACTIVE INDEX; RF SYSTEMS; TITANIUM OXIDES
- Descriptors DEC
- BEAMS; CHALCOGENIDES; CURRENTS; DEPOSITION; ENERGY RANGE; EV RANGE; OPTICAL PROPERTIES; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS