Published October 1988 | Version v1
Journal article Metadata-only

A γ-ray and small-angle neutron scattering study of oxygen precipitation in silicon single crystals

Creators

  • 1. Reading Univ. (UK). J.J. Thomson Physical Lab.

Description

Oxygen precipitation in heat-treated Czochralski-grown silicon single crystals has been investigated using γ-ray diffraction combined with small-angle neutron scattering and infrared absorption measurements. Diffuse scattering around the diffraction peaks was observed using γ-rays and this is associated with oxygen precipitation in the silicon lattice. The analysis of the diffuse scattering produces an average precipitate size in agreement with small-angle neutron scattering measurements. (author)

Additional details

Publishing Information

Journal Title
Philosophical Magazine Letters
Journal Volume
58
Journal Issue
4
Series
Philos Mag. Lett.
Journal Page Range
183-188
ISSN
0950-0839
CODEN
PMLEE

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
20004947
Subject category
S73: NUCLEAR PHYSICS AND RADIATION PHYSICS;
Descriptors DEI
CZOCHRALSKI METHOD; DIFFRACTION; GAMMA RADIATION; INFRARED SPECTRA; MONOCRYSTALS; NEUTRONS; OXYGEN; PRECIPITATION; SILICON; SILICON OXIDES; SMALL ANGLE SCATTERING
Descriptors DEC
BARYONS; CHALCOGENIDES; COHERENT SCATTERING; CRYSTALS; ELECTROMAGNETIC RADIATION; ELEMENTARY PARTICLES; ELEMENTS; FERMIONS; HADRONS; IONIZING RADIATIONS; NONMETALS; NUCLEONS; OXIDES; OXYGEN COMPOUNDS; RADIATIONS; SCATTERING; SEMIMETALS; SEPARATION PROCESSES; SILICON COMPOUNDS; SPECTRA