Published 1975 | Version v1
Book

Projected range statistics. Semiconductors and related materials. 2nd edition

Description

no abstract available

Additional details

Additional titles

Augmented title (English)
Ion implantation

Publishing Information

Publisher
Dowden, Hutchinson and Ross, Inc.
Imprint Place
Stroudsburg, PA
Imprint Pagination
v p.

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
6205962
Subject category
S73: NUCLEAR PHYSICS AND RADIATION PHYSICS;
Descriptors DEI
CHARGED-PARTICLE TRANSPORT; ION IMPLANTATION; RANGE; SEMICONDUCTOR MATERIALS
Descriptors DEC
RADIATION TRANSPORT