Study of elastic oscillations in solids initiated during ion implantation

Mechanical deformations and elastic waves generated by them, resulting from ion radiation in a solid are studied theoretically and experimentally. It is shown theoretically that mechanical stresses initiated by ion implantation in a solid surface layer lead to strains of irradiated material on the depth essentially exceeding the value of a designed ion path and for many cases constituting more than 1 μm. Besides, during ion implantation the value of deformations changes in time generating elastic oscillations. Oscillations have been registered by means of a contact acoustic measuring transducer attached to the reverse side of Si, GaAs and LiNbO3 plates irradiated by H+, He+ and Ar+ ions. It is established that frequency spectra and dose dependences of elastic oscillation signal levels depend on the form of implanted ions, their energies, density of ion current in a beam, target material and its orientation. A model of physical processes initiating mechanical oscillations in a solid during implantation is suggested on the basis of theoretical calculation results and experimental data