Published June 1991 | Version v1
Journal article

Plasma source ion implantation (PSII) in a magnetic well configuration

  • 1. Southwest Inst. of Physics, Leshan, SC (China)

Description

A rotational plasma technique was used for investigating ion implantation of material. In the process of PSII, targets were immersed in a plasma and were DC-biased to high negative volage (22 kV in the experiments). The mechanism related to this technique and experimental results are presented

Additional details

Publishing Information

Journal Title
Nuclear Fusion and Plasma Physics
Journal Volume
11
Journal Issue
2
Series
Nucl. Fusion Plasma Phys.
Journal Page Range
106-110
ISSN
0254-6086
CODEN
HYDWD