Published October 1, 2009
| Version v1
Journal article
Atom probe microscopy of three-dimensional distribution of silicon isotopes in 28Si/30Si isotope superlattices with sub-nanometer spatial resolution
Creators
- 1. School of Fundamental Science and Technology, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522 (Japan)
- 2. Corporate Research and Development Center, Toshiba Corporation, 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522 (Japan)
- 3. Toshiba Nanoanalysis Corporation, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8583 (Japan)
Description
Laser-assisted atom probe microscopy of 2 nm period 28Si/30Si isotope superlattices (SLs) is reported. Three-dimensional distributions of 28Si and 30Si stable isotopes are obtained with sub-nanometer spatial resolution. The depth resolution of the present atom probe analysis is much higher than that of secondary ion mass spectrometry (SIMS) even when SIMS is performed with a great care to reduce the artifact due to atomic mixing. Outlook of Si isotope SLs as ideal depth scales for SIMS and three-dimensional position standards for atom probe microscopy is discussed.
Additional details
Identifiers
- DOI
- 10.1063/1.3236673;
Publishing Information
- Journal Title
- Journal of Applied Physics
- Journal Volume
- 106
- Journal Issue
- 7
- Journal Page Range
- p. 076102-076102.3
- ISSN
- 0021-8979
- CODEN
- JAPIAU
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 41096429
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ION MICROPROBE ANALYSIS; IONS; LASERS; MASS SPECTRA; MASS SPECTROSCOPY; MICROSCOPY; SEMICONDUCTOR MATERIALS; SILICON; SILICON 28; SILICON 30; SPATIAL RESOLUTION; SUPERLATTICES; THREE-DIMENSIONAL CALCULATIONS
- Descriptors DEC
- CHARGED PARTICLES; CHEMICAL ANALYSIS; ELEMENTS; EVEN-EVEN NUCLEI; ISOTOPES; LIGHT NUCLEI; MATERIALS; MICROANALYSIS; NONDESTRUCTIVE ANALYSIS; NUCLEI; RESOLUTION; SEMIMETALS; SILICON ISOTOPES; SPECTRA; SPECTROSCOPY; STABLE ISOTOPES
Optional Information
- Notes
- (c) 2009 American Institute of Physics