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[en] Effect of a simultaneous thermal treatment at 480°C and X-ray radiation (irradiation dose 10−3 C/kg (∼4 R) in a vacuum (residual pressure 10−3 Pa) on the structure and properties of titanium oxide nanocoatings of various thicknesses, synthesized by the molecular layering technology on the inner surface of glass bulbs of X-ray tubes, was examined. It was shown that the thermal and X-ray radiation treatments in a vacuum lead to a recrystallization of the titanium oxide layer and removal of oxygen atoms from its composition, which affects the electrical properties of the system.