Published 2014
| Version v1
Book
Controlling the growth rate of amorphous silicon films during magnetron sputtering
Creators
- 1. Saratovskij Gosudarstvennyj Univ. imeni N.G. Chernyshevskogo, Saratov (Russian Federation)
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- Upravlenie skorost'yu rosta plenok amorfnogo kremniya pri sinteze metodom magnetronnogo raspyleniya
Publishing Information
- Publisher
- IMET RAN
- Imprint Place
- Moscow (Russian Federation)
- ISBN
- 978-5-4253-0753-8
- Imprint Title
- XI Russian annual conference of young researchers and graduate students Physico-chemistry and technology of inorganic materials (with international participation). Collection of materials
- Imprint Pagination
- 619 p.
- Journal Page Range
- p. 525-526
Conference
- Title
- 11. Russian annual conference of young researchers and graduate students Physico-chemistry and technology of inorganic materials (with international participation)
- Original Conference Title
- XI Rossijskaya ezhegodnaya konferentsiya molodykh nauchnykh sotrudnikov i aspirantov Fiziko-khimiya i tekhnologiya neorganicheskikh materialov (s mezhdunarodnym uchastiem)
- Dates
- 16-19 Sep 2014
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 48050245
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- AMORPHOUS STATE; PRESSURE DEPENDENCE; PRESSURE RANGE MILLI PA; REACTION KINETICS; SILICON; SPUTTERING; SYNTHESIS; THIN FILMS
- Descriptors DEC
- ELEMENTS; FILMS; KINETICS; PRESSURE RANGE; SEMIMETALS
Optional Information
- Lead record
- g8k1e-zq052
- Notes
- 2 refs., 1 fig. Imprint:XI Rossijskaya ezhegodnaya konferentsiya molodykh nauchnykh sotrudnikov i aspirantov Fiziko-khimiya i tekhnologiya neorganicheskikh materialov (s mezhdunarodnym uchastiem). Sbornik materialov