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AbstractAbstract
[en] Reflection spectrometric investigations on highly doped material are carried out. The spectrum is characterized by a peak-trough ratio (PTR). The PTR shape is shown from low to very high doses for As, P, Si, and B doping (30 - 50 keV) and for fast neutron irradiation. As, P, and Si have a rather similar PTR-dose dependence, whereas B has a larger penetration depth. (author)
Original Title
UV-Reflexionsspektren bei Hochdosisimplantation in Si
Source
Muenze, R. (ed.); Zentralinstitut fuer Kernforschung, Rossendorf bei Dresden (German Democratic Republic); p. 183-186; Sep 1977; p. 183-186
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