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AbstractAbstract
[en] Investigations were carried out in order to check the possibilities of applying the cyclotron beam to observe the channelling effect in Rutherford backscattering. Analysis of series of examples proved that proton and alpha particle beams accelerated with INP C-48 cyclotron could be a valuable tool for investigating the properties of heavy ion implanted single crystals. Heavy dopand concentration, impurity atoms localization, presence of undesired contamination, and degree of restoration of a host crystal after annealing can be studied. (author)
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1976; 25 p
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