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AbstractAbstract
[en] It is supposed that ions (species 1) are incident on a layer (species 2) near the surface of a solid target (species 3), that the differential scattering cross-section is dsigma12, and that the integral depth-distribution function for an atom at depth x' recoiling at angle psi and stopping beyond depth x is F23(x - x', psi). The overall integral distribution function for atoms recoil implanted or recoil-sputtered from a thin source located at x' is then given approximately by : Hsup((2)) (x - x') α fdsigma12 F23(x - x', psi). The authors write Hsup((2)) (x - x') to describe recoil implantation, Hsup((2)) (-infinity) -Hsup((2)) (-x') to describe recoil sputtering, and the appropriate integrals of these with respect to x' to take into account moderately thick sources. Numerical solutions are presented for several mass ratios, M3/M2 and are applied to three categories of problem relevant to fusion devices. These are bombardment removal of light surface layers, similar experiments with heavy surface layers, and bombardment in general of alloys. (Auth.)
Secondary Subject
Source
3. international conference on plasma surface interactions in controlled fusion devices; Abingdon, UK; 3 - 7 Apr 1978
Record Type
Journal Article
Literature Type
Conference
Journal
Journal of Nuclear Materials; ISSN 0022-3115;
; v. 76-77 p. 175-182

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