[en] Two combined systems of AES-SIMS-FDS (Flash Desorption Spectroscopy) and AES-IMA have been applied to the study of physical and chemical sputtering processes of graphite and SiC. In the AES-SIMS-FDS system, the interactions of the sample surfaces with proton, deuteron, helium or argon ion beams in the energy range 0.7-2.9 keV were investigated to determine the quantitative surface composition by AES and distinguish the sputtered ionic species by SIMS at various temperatures, simultaneously. The AES-IMA system could be used to characterise the surface by AES and SEM. (Auth.)