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Simons, D.S.; Sheffield, J.C.; Hanrahan, L.R.
Knolls Atomic Power Lab., Schenectady, NY (USA)1978
Knolls Atomic Power Lab., Schenectady, NY (USA)1978
AbstractAbstract
[en] A unique type of secondary ion mass spectrometer that incorporates features of both the direct-imaging ion microscope and the scanning ion microprobe has been constructed. A hybrid ion detector permits the detection of positive or negative secondary ions with equal efficiency. Examples are provided to illustrate the performance of the instrument and of the detector. 12 figures
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Sep 1978; 23 p; Available from NTIS., PC A02/MF A01
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Report
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