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AbstractAbstract
[en] Ion implantation is a nonequilibrium process. It is possible to implant materials with impurities to concentration levels which exceed the solid solubilities. The return of the system to thermodynamic equilibrium is often accomplished by precipitation of the implanted species or a compound involving atoms of both the host and the implanted species. This may involve long time scales when taking place at room temperature or it may take place during the implantation
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Secondary Subject
Source
1978; 22 p; Available from NTIS., PC A02/MF A01
Record Type
Report
Report Number
Country of publication
ALUMINIUM COMPOUNDS, ANNEALING, BERYLLIUM, BERYLLIUM ALLOYS, BINARY ALLOY SYSTEMS, COPPER, COPPER ALLOYS, CRYSTAL-PHASE TRANSFORMATIONS, DIFFUSION, FREE ENTHALPY, GLASS, ION IMPLANTATION, LITHIUM COMPOUNDS, NUCLEATION, OPTICAL PROPERTIES, PERMEABILITY, PHASE DIAGRAMS, PRECIPITATION, SILICON COMPOUNDS, SILVER, SILVER ALLOYS, SOLUBILITY
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