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AbstractAbstract
[en] A high speed dimensional measuring system capable of scanning a thin film network, and determining if there are conductor widths, resistor widths, or spaces not typical of the design for this product is described. The eye of the system is a conventional TV camera, although such devices as image dissector cameras or solid-state scanners may be used more often in the future. The analog signal from the TV camera is digitized for processing by the computer and is presented to the TV monitor to assist the operator in monitoring the system's operation. Movable stages are required when the field of view of the scanner is less than the size of the object. A minicomputer controls the movement of the stage, and communicates with the digitizer to select picture points that are to be processed. Communications with the system are maintained through a teletype or CRT terminal
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Source
Schuman, J.F. (comp.); California Univ., Livermore (USA). Lawrence Livermore Lab; p. 192-200; 1978; p. 192-200; 37. nonconvertional metrology meeting; Livermore, CA, USA; 17 - 19 Apr 1978
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Report
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Conference
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