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Stoltz, D.L.; Starkey, J.P.
Bendix Corp., Kansas City, MO (USA)1979
Bendix Corp., Kansas City, MO (USA)1979
AbstractAbstract
[en] Quantitative chemical analysis of 500- and 2000-angstrom tantalum--nitride films on glass substrates has been accomplished using an electron microprobe x-ray analyzer. In order to achieve this analysis, modifications to the microprobe were necessary. A description of the calibration procedure, the method of analysis, and the quantitative results are discussed
Source
Jun 1979; 18 p; Available from NTIS., PC A02/MF A01
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