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Montier, M.; Roche, D.; Lafeuille, D.
CEA Centre d'Etudes Nucleaires de Grenoble, 38 (France). Lab. d'Electronique et de Technologie de l'Informatique1976
CEA Centre d'Etudes Nucleaires de Grenoble, 38 (France). Lab. d'Electronique et de Technologie de l'Informatique1976
AbstractAbstract
[en] A new technology for simultaneous Boron and Phosphorus diffusions has been realized. This technology has two advantages: it subsitutes expansive high doses ion implantations and it simplifies the whole technology, because Boron and Phosphorus diffusions are simultaneous. A low temperature deposition of Phosphorus doped silicon oxide is used and then a classical Boron diffusion. The radioactivation techniques allowed us to qualify the whole technology and to determine the appropriate conditions to be used for the Phosphorus solid-solid diffusion
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1976; 3 p; Fall meeting of the Electrochemical Society; Las Vegas, NV, USA; 17 - 22 Oct 1976
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