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AbstractAbstract
[en] There are a wide variety of instrumental problems which are present to some degree in all AEM instruments. The nature and magnitude of these artifacts can in some instances preclude the simple quantitative interpretation of the recorded x-ray emission spectrum using a thin-film electron excitation model; however, by judicious modifications to the instrument these complications can be effectively eliminated. The specific operating conditions of the microscope necessarily vary from one analysis to another depending on the type of specimen and experiment being performed. In general, however, the overall performance of the AEM system during x-ray analysis is optimized using the highest attainable incident electron energy; selecting the maximum probe diameter and probe current consistent with experimental limitations; and positioning the x-ray detector in a geometry such that it records information from the electron entrance surface of the specimen
Source
1979; 68 p; 37. annual Electron Microscopy Society of American meeting; San Antonio, TX, USA; 13 - 17 Aug 1979; Available from NTIS., PC A04/MF A01
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