[en] Self-diffusion coefficients for Ca and Y were measured in pure and YF₃-doped CaF₂ crystals for dopant levels ranging from 2 to 10 mole %. Diffusion data were analyzed as a function of temperature and as a function of composition. Comparison of Arrhenius relationships for both Ca and Y showed that the activation energy for cation diffusion decreased approximately linearly as the YF₃ dopant level increased. Atomic jump pathways were considered and the decrease in the activation energy was explained by an increase in the constriction sizes due to Willis cluster formation. Diffusion coefficients for both cations were found to increase approximately linearly with square of the mole percent YF₃. A comparison of activation energies and diffusion coefficients for both cations in doped crystals indicated that Y required lower activation energy for diffusion than Ca but the diffusion coefficient was also lower for Y compared to Ca. The smaller activation energy for Y was explained by the smaller ionic size of Y, whereas the smaller diffusion coefficient for Y was explained on the basis of highly correlated jumps of Y ions because of interaction between Y/sub Ca/ and V/sub Ca/