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[en] Mechanism of radio-frequency plugging and heating are described in terms of the plasma impedance. It is shown theoretically that the rf plugging effect appears in the frequency region, where the capacitance of rf electrodes decreases when the plasma is filled between them. The heating occurs inversely proportional to the resistance of the electrodes. These theoretical predictions are compared with the experimental observations, demonstrating a satisfactory agreement. (author)
Journal
Journal of the Physical Society of Japan; ISSN 0031-9015; 
; v. 49(1); p. 327-333
; v. 49(1); p. 327-333