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AbstractAbstract
[en] Currently favored IF target designs include low Z coatings seeded with small amounts of high Z elements. A method for incorporating high Z elements into glow discharge polymerized (GDP) coatings is being investigated. In this method we have substituted an iodine atom onto the p-xylene molecule prior to GDP deposition. Chemical analysis, IR, and NMR of the resultant coating indicates up to 7 at.% incorporation of chemically bound iodine. Metallic sputter/GDP codeposition has been reported1, and is being installed in our latest deposition system
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Journal Article
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Journal of Vacuum Science and Technology; ISSN 0022-5355;
; v. 18(3); p. 1255-1257

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