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[en] Using glancing incidence (a target tilt between 80-830), the depth resolution of the 16O(α,α)16O resonance for oxygen detection has been improved by a factor of 5-7 depending on the depth. The more buried the oxide, the more straggling contribution is observed. Besides, at present scattering geometry an additionally 3.5 times better detection limit is achieved. (orig.)
Journal
Nuclear Instruments and Methods; ISSN 0029-554X; 
; v. 180(2/3); p. 619-623
; v. 180(2/3); p. 619-623