[en] A system of integral equations for the density of neutral atoms and their energy is numerically solved. The Maxwell and monoenergetic plasma ion distributions are calculated with regard to diffusive and ideal atom reflection from the wall, using the experimentally obtained ionization cross sections, charge exchange, recombination and the reflection coefficient. It follows from the calculations that in contrast to the neutral atom energy their density distribution weakly depends on the type of the ion distribution function. Using the measured plasma density and temperature distributions, the peculiarities of the neutral atom behaviour in discharge can be revealed. The solutions obtained for the basic equations permitted to determine the neutral atom flux on the wall, the carried out of the discharge energy, as well as using the experimentally measured coefficients of material sputtering, the amount of impurities appeared as a result of sputtering by atoms can be calculated