[en] Many experimental results have suggested that the charge state distribution of ions have penetrated through solid is different from that inside the solid. It is important to clarify the physical process taking place at solid surface in order to know the states of ions inside the solid from those observed outside the solid. In the present paper, we report our measurement of charge state distributions of He⁺ and H²⁺ ions having been scattered in small angles (less than 4₀) at surfaces of Au, Ag and C. One of the advantages of the use of the glancing collision of ions at solid surface for the study of ion-surface interaction is that the dwell time of ion near solid surface can be made more than 100 times longer than that in normal transmission experiments. The longer dwell times may alter any contribution of solid surface to electron capture and loss of ions