[en] Synchrotron Radiation excited X-Ray Fluorescence is a potentially powerful tool for the routine quantitative chemical analysis of materials, with minimum detection limits typically of the order of a tenth of a ppm, and with the added advantages of simultaneous multi-element detection capability, spatial resolution on a micron scale, large signal to noise ratios and short analysis times. This paper presents a brief review of the use of Synchrotron Radiation in Trace Element Analysis and discusses the requirements for a microprobe for chemical analysis utilising SR. Data obtained at the Synchrotron Radiation Source, Daresbury Laboratory include XRF spectra of standard reference materials and an application of the technique to the study of ion implanted layers in semiconductors is outlined. (author)