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Ceglio, N.M.; Price, R.H.; Hawryluk, A.M.; Melngailis, J.; Smith, H.I.
Lawrence Livermore National Lab., CA (USA); Massachusetts Inst. of Tech., Cambridge (USA)1981
Lawrence Livermore National Lab., CA (USA); Massachusetts Inst. of Tech., Cambridge (USA)1981
AbstractAbstract
[en] Gold gratings with spatial periods of 0.3 and 0.2 μm have been fabricated in thicknesses of 0.6 and 0.25 μm, respectively, and used in x-ray spectroscopy and spatial-period-division. Fabrication techniques included: holographic lithography, shadowing, x-ray lithography and gold microplating. Control of linewidth to tolerances of the order of 10 nm has been demonstrated for gratings of 0.2 μm period. A high resolution imaging spectrometer, composed of a 22x Wolter x-ray microscope in conjunction with a gold transmission grating, was tested. At a wavelength of 0.69 nm a resolving power, lambda/Δ lambda, of 200 was demonstrated. Resolution in this case was source size limited. Gratings of 99.5 nm period were exposed in PMMA by x-ray (lambda = 4.5 nm) spatial-period-division
Source
Dec 1981; 17 p; 16. symposium on electron ion and photon beam technology; Dallas, TX (USA); 26-29 May 1981; CONF-8105103--2; Available from NTIS., PC A02/MF A01 as DE82010065
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