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AbstractAbstract
[en] The unique difficulties of evaporating enriched silicon starting with the oxide are cited and the literature reviewed and discussed briefly. A procedure is reported which has shown some degree of success
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Source
1983; 15 p; International Nuclear Target Society workshop; Argonne, IL (USA); 7-9 Sep 1983; CONF-8309127--4; Available from NTIS, PC A02/MF A01 as DE84001543
Record Type
Report
Literature Type
Conference
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