[en] The resistance increase in thin carbon films caused by energetic particle bombardment has been developed into a new device, the carbon resistance probe, to measure the energy and flux of particles at the edge of a plasma. In the present work we have calibrated this probe by ion implantation of hydrogen and deuterium with energies from 20 to 1600 eV, and have demonstrated sensitivity to particles with energies as low as 30 eV. Calibrations are also presented for thin-layer resistance probes, a new configuration in which energy resolution is obtained using carbon films and ranging overlayers comparable in thickness to the range of the particles. The results show that thin-layer probes can be used to measure the particle energies and fluxes typically encountered at the first wall of a tokamak