[en] Equipment modifications at the Lawrence Berkeley Laboratory (LBL) Rutherford backscattering facility, including the addition of a high precision goniometer, have been made to enhance the performance of channeling experiments. The angular divergence of the alpha particle beam was also reduced to <0.05⁰ by improving the collimation. To demonstrate improved channeling capability angular scans were performed about the [100], [110], and [111] axial channels of a 3400 A (100) silicon membrane. Both the minimum yield, chi/sub min/, and the critical angle, psi/sub 1/2/, were consistent with accepted values. A preliminary investigation of the lattice location of cobalt on the (100) silicon surface was undertaken. Approximately 4.5 x 10¹⁵ Co atoms/cm² were electron beam deposited on a 3900 A, HF etched silicon membrane in a system using oilless pumps. Preliminary channeling data taken approximately one month later indicated a preferred site for approximately 16% of the cobalt atoms. Channeling data obtained six months later with the new goniometer showed no evidence for a preferred site. Room temperature oxidation between experiments was observed and is thought to have affected the location of the cobalt atoms. 33 references, 15 figures