[en] Resonance ionization mass spectrometry (RIMS) has recently been developed into a useful technique for isotope ratio measurements. Studies performed in our laboratory [1-6] have been reported for a variety of elements using thermal vaporization sources to produce the atom reservoir for laser-induced resonance ionization. A commercial ion microprobe mass analyzer (IMMA) has been interfaced with a tunable pulsed dye laser for carrying out resonance ionization mass spectrometry of sputtered atoms. The IMMA instrument has many advantages for this work, including a micro-focused primary ion beam (2 μm in diameter) of selected mass, complete sample manipulation and viewing capability, and a double-focusing mass spectrometer for separation and detection of the secondary or laser-generated ions. Data were obtained demonstrating the number and type of ions formed along with optical spectral information showing the wavelengths at which resonance ionization occurs. 7 refs