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Jellison, G.E. Jr.; Lowndes, D.H.; Mashburn, D.N.; Wood, R.F.
Oak Ridge National Lab., TN (USA)1985
Oak Ridge National Lab., TN (USA)1985
AbstractAbstract
[en] Time-resolved reflectivity measurements of silicon and germanium have been made during pulsed KrF excimer laser irradiation. The reflectivity was measured simultaneously at both 1152 and 632.8 nm wavelengths, and the energy density of each laser pulse was monitored. The melt duration and the time of the onset of melting were measured and compared with the results of melting model calculations. For energy densities just above the melting threshold, it was found that the melt duration was never less than 20 ns for Si and 25 ns for Ge, while the maximum reflectivity increased from the value of the hot solid to that of the liquid over a finite energy range. These results, along with a reinterpretation of earlier time-resolved ellipsometry measurements, indicates that, during the melt-in process, the near-surface region does not melt homogeneously, but rather consists of a mixture of solid and liquid phases. The reflectivity at the onset of melting and in the liquid phase have been measured at both 632.8 and 1152 nm, and are compared with the results found in the literature
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Nov 1985; 8 p; Materials Research Society meeting; Boston, MA (USA); 2-7 Dec 1985; Available from NTIS, PC A02; 3 as DE86004804; Paper copy only, copy does not permit microfiche production.
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