[en] Method for measuring local plasma parameters is described. The method includes plasma probing with resonance radiation, detecting of plasma fluorescence spectrum with spatial resolution, measurement of probing radiation intensity and fluorescence power, determination of local concentration of plasma component using fluorescence cross section as well as determination of local temperature of plasma component population from their concentrations ratio. To improve measurement accuracy, probing radiation intensity is changed and dependence of fluorescence power on intensity of probing radiation is recorded during measurements. Method realization permits to improve measurement sensitivity two times at the minimum, to increase time resolution of measurements up to 10sup(-6) s as well as to automate the measurement process. The described method and device are possible to use for its realization when measuring cross sections of collisions and atomic constants