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AbstractAbstract
[en] The technique of channeling contrast microscopy has been developed over the past few years for use with the Melbourne microprobe. It has been used for several profitable analyses of small-scale structures in semiconductor materials. This paper outlines the basic features of the technique and examples of its applications are given
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Australian Inst. of Nuclear Science and Engineering, Lucas Heights; 279 p; Nov 1985; p. 220-224; 4. Australian conference on nuclear techniques of analysis; Lucas Heights (Australia); 6-8 Nov 1985
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Miscellaneous
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Conference
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