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Takagi, Y.; Flessa, S.A.; Hart, K.L.; Pawlik, D.A.; Kadin, A.M.; Wood, J.L.; Keem, J.E.; Tyler, J.E.
Applications of thin film multilayered structures to figured x-ray optics1985
Applications of thin film multilayered structures to figured x-ray optics1985
AbstractAbstract
[en] W(10A)/C(40A), W(15A)/C(15A), and W(40A)/C(10A) periodic multilayer films were prepared by magnetron sputtering and subsequently annealed at 7300C. The resulting change of the layered and crystal structures was studied by X-ray diffraction. The resulting structures largely depended on the thickness ratio of W to C. For example, in the W(15A)/C(15A) sample α-W was formed without any peaks of carbon crystals; in W(40A)/C(10A) only W/sub 2/C (orthorhombic) peaks appeared
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Marshall, G.F; p. 66-70; ISBN 0-89252-598-3;
; 1985; p. 66-70; Society of Photo-Optical Instrumentation Engineers; Bellingham, WA (USA); SPIE international technical symposium on optical and electro-optical engineers; San Diego, CA (USA); 18-23 Aug 1985

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