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[en] A computer controlled e-beam evaporation system is described, which allows fully automated production of soft X-ray reflection coatings with laterally graded d-spacing. Thickness control is done by measurement of the soft X-ray refection coefficient on a reference substrate during deposition. Graded thickness is obtained by computer controlled movement of shutters. A result is given for automatic deposition of a multilayer coating
Source
Marshall, G.F; p. 36-42; ISBN 0-89252-598-3; 
; 1985; p. 36-42; Society of Photo-Optical Instrumentation Engineers; Bellingham, WA (USA); SPIE international technical symposium on optical and electro-optical engineers; San Diego, CA (USA); 18-23 Aug 1985
; 1985; p. 36-42; Society of Photo-Optical Instrumentation Engineers; Bellingham, WA (USA); SPIE international technical symposium on optical and electro-optical engineers; San Diego, CA (USA); 18-23 Aug 1985