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AbstractAbstract
[en] This paper describes how the observed mechanical properties of ceramic surfaces after ion implantation are related to the structural changes occurring in the surface, and presents a number of criteria designed to enable prediction of the mechanical property modifications that will ensue after implantation of a given substrate with a given ion. These include the application of a bond-type criterion to determine the amorphisation dose (amorphisation critically affecting mechanical properties) and an elasticity criterion to determine the maximum likely implantation induced surface stress. (author)
Source
3. international conference on radiation effects in insulators; Guildford (UK); 15-19 Jul 1985
Record Type
Journal Article
Literature Type
Conference
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