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AbstractAbstract
[en] 30 keV O2+ ions are implanted in aluminium foil, at various doses ranging from 5 x 1016 to 5 x 1017 atoms cm-2. The sheet resistance was measured for unimplanted and implanted specimens. Up to the dose of 3 x 1017 atoms cm-2, the sheet resistance gradually increased. It formed a perfect insulating layer on the surface, above a dose of 3 x 1017 atoms cm-2. X-ray photo-electron spectroscopy measurements indicated the formation of an Al2O3 layer with the absence of a signal due to unbonded aluminium for a dose of 5 x 1017 atoms cm-2. Whereas a specimen implanted at 5 x 1016 atoms cm-2 shows the presence of pure aluminium. Micrographs of the specimen implanted at the higher dose displayed the microtopography characteristic of alumina. The results are in agreement with a recently published mechanism of Al2O3 formation. The Al2O3 precipitates increasing with dose and a layer of Al2O3 being formed at the doses higher than that required to form the stoichiometric Al2O3. (author)
Source
Radiation effects in insulators: 3. international conference; Guildford (UK); 15-19 Jul 1985
Record Type
Journal Article
Literature Type
Conference; Numerical Data
Journal
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INIS VolumeINIS Volume
INIS IssueINIS Issue