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Emerson, L.C.; Knize, R.J.; Cecchi, J.L.
Princeton Univ., NJ (USA). Plasma Physics Lab1986
Princeton Univ., NJ (USA). Plasma Physics Lab1986
AbstractAbstract
[en] Pumping speed measurements have been obtained for a number of gaseous hydrocarbons including members of the alkene, alkadiene, and cycloalkane groups as a function of temperature using a Zr-Al alloy getter. Pumping speeds were obtained by analysis of an exponential least squares fit to the pressure decay curve following introduction of each gas. It was found that these pumping speeds are relatively high (up to 400 1/s) and exhibit, with only a few exceptions, little temperature dependence. This is in contrast to the earlier reported results for the alkane series
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1986; 8 p; 10. international vacuum congress and 6. international conference on solid surfaces and the 33. national symposium of the American Vacuum Society; Baltimore, MD (USA); 27-31 Oct 1986; Available from NTIS, PC A02/MF A01 as DE87002181
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