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AbstractAbstract
[en] Electron-beam vapor sources are now widely used in material processing sciences and coating technologies, such as the semiconductor industry for producing aluminum films on Si wafers; the metallurgical industry for melting, evaporating, and refining metals; and at Lawrence Livermore National Laboratory (LLNL) for vaporizing metals for laser isotope separation applications. Power for these sources ranges from the kW regime in the semiconductor industry to the multi-MW regime in laser separation technology. Operations of these sources can generate copious amounts of x rays by the direct and indirect interactions of the energetic electrons with the target materials. In this paper, we present the results of our calculations regarding the x-ray emission intensity, angular intensity and energy spectrum distribution, and shielding characteristics for vapor sources with acceleration voltages from 10 kV to 60 kV. 4 refs., 12 figs., 2 tabs
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14 Nov 1986; 12 p; Midyear topical symposium of the Health Physics Society: health physics of radiation-producing machines; Reno, NV (USA); 8-12 Feb 1987; CONF-870219--4; Available from NTIS, PC A02/MF A01; 1 as DE87002756; Portions of this document are illegible in microfiche products.
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