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AbstractAbstract
[en] Starting from a previous kinetic theory of the plasma boundary layer (charge exchange model of the presheath) we investigate a collisionless planar electrode sheath of a capacitively coupled rf discharge in the frequency range between the ionic and electronic plasma frequencies (ωp+<<ω<<ωp-). The resulting model equations are evaluated in an approximation based on thick sheath assumptions. We calculate the current voltage characteristics of the sheath and analyse the voltage distribution in a two electrode system. (orig.)
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Oct 1988; 29 p
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